Peer Review History: Lithographic patterning methods in microelectromechanical systems fabrication: a critical narrative review of capability claims, process coupling and manufacturability

Approved by:

(1) Dr. Bharatish A, RV College of Engineering, India.

Reviewers:

(1) Nita Indriyani, M.T, Universitas Pendidikan Muhammadiyah Sorong, Indonesia.

(2) Alireza Ramezani, Amirkabir University of Technology (AUT), Iran.

Additional Reviewers:

Peer Review History:

Peer review report_1 (Nita Indriyani, M.T, Indonesia) | File 1 | NA

Peer review report_2 (Alireza Ramezani, Iran) | File 1 | NA

Comment_ Academic Editor_1_v1 | File 1 | NA